user TURBO?s replication of Steven Mark?s TPU ?

[pese]

frequency generator and counternot necessary !
take your sound card . find software to generate (nearly) any frequency.

condtruct your device AND  adhust this needed frequencies witg the
soundcard .
why ?
If 2 different producrd frequencies are the same , the difference (also harmonics) between them go to ZERO.

AVC Meter , or Speaker , bulb  any simple and cheap instruments are to use , to do this job.
Think simpel abot this small  problems.
Pese

[AhuraMazda]

My advice is you should not attempt this project unless you have a scope. Even a basic scope gets you out of a lot of holes. I am sorry if this might sound brutal.
Also I recommend both kinds of multi-meters analogue and digital.

Regards

AM

[JohnMalkovich]

 
It seems Steven Mark?s TPU uses "DC power supply" (battery?) and "RF power supply" - seems like he uses a battery to start his generator.

His patent:

http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PALL&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.htm&r=1&f=G&l=50&s1=6015476.PN.&OS=PN/6015476&RS=PN/6015476

"An RF power supply 24 is connected to the cathode electrode 22 through a series coupling capacitor 26. The RF power supply provides an RF voltage between the cathode electrode and the grounded anode electrode 18 which excites the gases within the chamber into a plasma state. The plasma body has a time-average positive DC potential or voltage relative to the cathode or anode electrodes which accelerates ionized process gas constituents to bombard the cathode and anode electrodes.

Magnetic enhancement of the plasma most commonly is implemented by a DC magnetic field in the region between the cathode and anode electrodes. The direction of the magnetic field is transverse to the longitudinal axis of the chamber, i.e., transverse to the axis extending between the cathode and anode electrodes. Various arrangements of permanent magnets or electromagnets are conventionally used to provide such a transverse magnetic field. One such arrangement is the pair of coils 30 shown in FIG. 1A, disposed on opposite sides of the cylindrical chamber side wall 12. The two coils 30 are connected in series and in phase to a DC power supply, not shown, so that they produce transverse magnetic fields which are additive in the region between the two coils. This transverse magnetic field is represented in FIGS. 1A and 1B by the vector B oriented along the negative x-axis. In the preferred embodiment, the diameter of each coil approximately equals the spacing between the two coils. (The second pair of coils 32 shown in FIG. 1B will be discussed later, but may be ignored for purposes of the present discussion.) An example of such a magnetically enhanced plasma etch chamber is described in commonly assigned U.S. Pat. No. 5,215,619 issued Jun. 1, 1993 to Cheng et al., the disclosure of which is hereby incorporated into the present patent specification."

[twosox]

@pese

this is the software i use, i have it installed on 2 machines, one for generating the frequencys
and one for looking at the coil output using the scope. its not bad but it does let me see whats
going on.

http://www.sillanumsoft.com/

attached piccies, coil being fed with 216 - 432 - 864 hz.


derek.

[hartiberlin]

Hi Derek,
nice results.
Could you please post,
how you connected your 6 control coils together ?

Is every coil pair (e.g. 1/1 and 1/2 ,2/1 and 2/2, 3/1 and 3/2) in parallel and each pair driven with a square or sine wave ?

Many thanks.